Geun Young Yeom

Years Active: 2021-2024
Publications (10 Years): 3

This page only lists publications with an associated author ORCID identifier.

Publications

You Jin Ji, Hae In Kim, Ji Eun Kang, Seung Yup Choi, Ki Hyun Kim, Doo San Kim, Albert Rogers Ellingboe, Hye Min Kim, Geun Young Yeom, Dong-Woo Kim
Plasma enhanced atomic layer deposition of silicon nitride using magnetized very high frequency plasma. Nanotechnology (2024)
Seongjae Yoo, Ji Eun Kang, You Jin Ji, Hyun Woo Tak, Byeong Ok Cho, Young Lae Kim, Ki Chan Lee, Jin Sung Chun, Yongil Kim, Dong-Woo Kim, Geun Young Yeom
Highly selective etching of SiN x over SiO 2 using ClF 3 /Cl 2 remote plasma. Nanotechnology (2023)
Gyo Wun Kim, Won Jun Chang, Ji Eun Kang, Hee Ju Kim, Geun Young Yeom
Reduction of EUV resist damage by neutral beam etching. Nanotechnology 33 (9) (2021)

Geun Young Yeom.css-eqlu8i{font-size:small;padding-left:4px;}