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Pengzhan Liu
ORCID
Publication Activity (10 Years)
Years Active: 2023-2023
Publications (10 Years): 1
Top Topics
High Density
Stress Induced
Top Venues
Sensors (Basel, Switzerland)
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This page only lists publications with an associated author ORCID identifier.
Publications
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Yonggyun Park
,
Pengzhan Liu
,
Seunghwan Lee
,
Jinill Cho
,
Eric Joo
,
Hyeong-U Kim
,
Taesung Kim
Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD.
Sensors (Basel, Switzerland)
23 (12) (2023)