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Probing material absorption and optical nonlinearity of integrated photonic materials.

Maodong GaoQi-Fan YangQing-Xin JiHeming WangLue WuBoqiang ShenJunqiu LiuGuanhao HuangLin ChangWeiqiang XieSu-Peng YuScott B PappJohn E BowersTobias Jan KippenbergKerry J Vahala
Published in: Nature communications (2022)
Optical microresonators with high quality (Q) factors are essential to a wide range of integrated photonic devices. Steady efforts have been directed towards increasing microresonator Q factors across a variety of platforms. With success in reducing microfabrication process-related optical loss as a limitation of Q, the ultimate attainable Q, as determined solely by the constituent microresonator material absorption, has come into focus. Here, we report measurements of the material-limited Q factors in several photonic material platforms. High-Q microresonators are fabricated from thin films of SiO 2 , Si 3 N 4 , Al 0.2 Ga 0.8 As, and Ta 2 O 5 . By using cavity-enhanced photothermal spectroscopy, the material-limited Q is determined. The method simultaneously measures the Kerr nonlinearity in each material and reveals how material nonlinearity and ultimate Q vary in a complementary fashion across photonic materials. Besides guiding microresonator design and material development in four material platforms, the results help establish performance limits in future photonic integrated systems.
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