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Fluorinated MOF-Based Hexafluoropropylene Nanotrap for Highly Efficient Purification of Octafluoropropane Electronic Specialty Gas.

Mingze ZhengWenjuan XueTongan YanZefeng JiangZhi FangHongliang HuangChongli Zhong
Published in: Angewandte Chemie (International ed. in English) (2024)
High-purity octafluoropropane (C 3 F 8 ) electronic specialty gas is a key chemical raw material in semiconductor and integrated circuit manufacturing industry, while selective removal of hexafluoropropylene (C 3 F 6 ) impurity for C 3 F 8 purification is essential but a challenging task. Here we report a fluorinated cage-like MOF Zn-bzc-CF 3 (bzc=5-(trifluoromethyl)-1H-pyrazole-4-carboxylic acid) for C 3 F 6 /C 3 F 8 separation. The incorporation of -CF 3 groups not only provides suitable pore aperture size for highly efficient size-exclusive C 3 F 6 /C 3 F 8 separation, but also creates hydrophobic microenvironments, endowing Zn-bz-CF 3 high chemical stability. Remarkably, Zn-bzc-CF 3 exhibits high C 3 F 6 adsorption capacity while excluding C 3 F 8 , achieving ideal molecular-sieving C 3 F 6 /C 3 F 8 separation. Breakthrough experiments show that Zn-bzc-CF 3 can efficiently separate C 3 F 6 /C 3 F 8 mixture and high-purity C 3 F 8 (99.9 %) can be obtained.
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