Login / Signup

The Role of Carbon in Metal-Organic Chemical Vapor Deposition-Grown MoS 2 Films.

Tianyu HouDi LiYan QuYufeng HaoYun Lai
Published in: Materials (Basel, Switzerland) (2023)
Acquiring homogeneous and reproducible wafer-scale transition metal dichalcogenide (TMDC) films is crucial for modern electronics. Metal-organic chemical vapor deposition (MOCVD) offers a promising approach for scalable production and large-area integration. However, during MOCVD synthesis, extraneous carbon incorporation due to organosulfur precursor pyrolysis is a persistent concern, and the role of unintentional carbon incorporation remains elusive. Here, we report the large-scale synthesis of molybdenum disulfide (MoS 2 ) thin films, accompanied by the formation of amorphous carbon layers. Using Raman, photoluminescence (PL) spectroscopy, and transmission electron microscopy (TEM), we confirm how polycrystalline MoS 2 combines with extraneous amorphous carbon layers. Furthermore, by fabricating field-effect transistors (FETs) using the carbon-incorporated MoS 2 films, we find that traditional n-type MoS 2 can transform into p-type semiconductors owing to the incorporation of carbon, a rare occurrence among TMDC materials. This unexpected behavior expands our understanding of TMDC properties and opens up new avenues for exploring novel device applications.
Keyphrases
  • room temperature
  • transition metal
  • quantum dots
  • reduced graphene oxide
  • highly efficient
  • single molecule
  • heavy metals
  • electron microscopy
  • carbon nanotubes