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A wafer-scale synthesis of monolayer MoS 2 and their field-effect transistors toward practical applications.

Yuchun LiuFuxing Gu
Published in: Nanoscale advances (2021)
Molybdenum disulfide (MoS 2 ) has attracted considerable research interest as a promising candidate for downscaling integrated electronics due to the special two-dimensional structure and unique physicochemical properties. However, it is still challenging to achieve large-area MoS 2 monolayers with desired material quality and electrical properties to fulfill the requirement for practical applications. Recently, a variety of investigations have focused on wafer-scale monolayer MoS 2 synthesis with high-quality. The 2D MoS 2 field-effect transistor (MoS 2 -FET) array with different configurations utilizes the high-quality MoS 2 film as channels and exhibits favorable performance. In this review, we illustrated the latest research advances in wafer-scale monolayer MoS 2 synthesis by different methods, including Au-assisted exfoliation, CVD, thin film sulfurization, MOCVD, ALD, VLS method, and the thermolysis of thiosalts. Then, an overview of MoS 2 -FET developments was provided based on large-area MoS 2 film with different device configurations and performances. The different applications of MoS 2 -FET in logic circuits, basic memory devices, and integrated photodetectors were also summarized. Lastly, we considered the perspective and challenges based on wafer-scale monolayer MoS 2 synthesis and MoS 2 -FET for developing practical applications in next-generation integrated electronics and flexible optoelectronics.
Keyphrases
  • quantum dots
  • room temperature
  • reduced graphene oxide
  • visible light
  • transition metal
  • highly efficient
  • gold nanoparticles
  • sensitive detection
  • high resolution
  • quality improvement