Deterministic Assembly of Three-Dimensional Suspended Nanowire Structures.

Controlled assembly of nanowire three-dimensional (3D) geometry in an addressable way can lead to advanced 3D device integration and application. By combining a deterministic planar nanowire assembly and a transfer process, we show here a versatile method to construct vertically protruding and suspending nanowire structures. The method harnesses the merits from both processes to yield positional and geometric control in individual nanowires. Multiple transfers can further lead to hierarchical multiwire 3D structures. Assembled 3D nanowire structures have well-defined on-substrate terminals that allow scalable addressing and integration. Proof-of-concept nanosenors based on assembled 3D nanowire structures can achieve high sensitivity in force detection.