Editorial for Special Issue "Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices".
Agnė ŽukauskaitėPublished in: Micromachines (2023)
The enhanced piezoelectric properties of aluminum scandium nitride (Al 1-x Sc x N or AlScN) were discovered in 2009 by Morito Akiyama's team [...].