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Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis.

Aodong ZhangJian XuYucen LiMing HuZijie LinYunpeng SongJia QiWei ChenZhaoxiang LiuYa Cheng
Published in: Micromachines (2022)
We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV irradiation at ~280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.
Keyphrases
  • circulating tumor cells
  • high throughput
  • carbon dioxide
  • single cell
  • high speed
  • high resolution
  • radiation therapy
  • tissue engineering
  • energy transfer
  • radiation induced
  • highly efficient
  • simultaneous determination