Metasurface interferometry toward quantum sensors.

Optical metasurfaces open new avenues for the precise wavefront control of light for integrated quantum technology. Here, we demonstrate a hybrid integrated quantum photonic system that is capable of entangling and disentangling two-photon spin states at a dielectric metasurface. Via the interference of single-photon pairs at a nanostructured dielectric metasurface, a path-entangled two-photon NOON state with circular polarization that exhibits a quantum HOM interference visibility of 86 ± 4% is generated. Furthermore, we demonstrate nonclassicality andphase sensitivity in a metasurface-based interferometer with a fringe visibility of 86.8 ± 1.1% in the coincidence counts. This high visibility proves the metasurface-induced path entanglement inside the interferometer. Our findings provide a promising way to develop hybrid-integrated quantum technology operating in the high-dimensional mode space in various applications, such as imaging, sensing, and computing.