Sacrificial Water-Soluble BaO Layer for Fabricating Free-Standing Piezoelectric Membranes.
Ryota TakahashiMikk LippmaaPublished in: ACS applied materials & interfaces (2020)
The use of a sacrificial water-soluble BaO layer was investigated for the purpose of fabricating free-standing single-crystalline BaTiO3 membranes for vibrational energy harvesting applications. An epitaxial BaTiO3/SrTiO3/BaO heterostructure was deposited on a SrTiO3(001) substrate by pulsed laser deposition. The sacrificial BaO layer was dissolved by immersing the heterostructure in water. A single-crystalline BaTiO3 membrane was thereby released from the SrTiO3(001) substrate and transferred onto a glass or polyethylene terephthalate (PET) substrate coated with a polydimethylsiloxane (PDMS) adhesion layer. A 200 nm-thick BaTiO3 membrane was sandwiched between two flexible PDMS/ITO/PET electrode layers, forming a vibrational energy harvester test device that could operate at an average electrical power output of over 1 μW. This membrane fabrication process is applicable to various flexible structures and materials in vibrational energy harvesting or dynamic strain-sensing applications.
Keyphrases
- water soluble
- energy transfer
- density functional theory
- molecular dynamics simulations
- computed tomography
- positron emission tomography
- pet ct
- room temperature
- raman spectroscopy
- amino acid
- photodynamic therapy
- pet imaging
- quantum dots
- staphylococcus aureus
- structural basis
- mass spectrometry
- solid state
- high speed
- organic matter
- biofilm formation
- atomic force microscopy
- tissue engineering