A Miniature Fabry-Pérot Fiber Interference Sensor Based on Polyvinyl Chloride Membrane for Acoustic Pressure Sensing in Mid-High-Frequency Band.

In this paper, a Fabry-Pérot interference fiber sensor was fabricated by using a Polyvinyl chloride membrane (20 μm in thickness) attached at the end of a ferrule with an inner diameter of 1.1 mm. In consideration of the vibration response of the membrane, the feature of the first-order natural frequency of membrane was analyzed by COMSOL Multiphysics. The acoustic sensing performance of the Fabry-Pérot fiber interference sensor was studied in air. The results reveal that the sensor possessed good acoustic pressure sensitivity, in the order of 33.26 mV/Pa. In addition, the noise-limited minimum detectable pressure level was determined to be 58.9 μPa/Hz 1/2 and the pressure-induced deflection obtained was 105 nm/Pa at the frequency of 1 kHz. The response of the sensor was approximately consistent with the reference sensor from 1 to 7 kHz. All these results support that the fabricated Fabry-Pérot fiber interference sensor may be applied for ultra-sensitive pressure sensing applications.