Estimation of plasma ion saturation current and reduced tip arcing using Langmuir probe harmonics.

We present a method to calculate the ion saturation current, Isat, for Langmuir probes at high frequency (>100 kHz) using the harmonics technique and we compare that to a direct measurement of Isat. It is noted that the Isat estimation can be made directly by the ratio of harmonic amplitudes, without explicitly calculating Te. We also demonstrate that since the probe tips using the harmonic method are oscillating near the floating potential, drawing little power, this method reduces tip heating and arcing and allows plasma density measurements at a plasma power flux that would cause continuously biased tips to arc. A multi-probe array is used, with two spatially separated tips employing the harmonics technique and measuring the amplitude of at least two harmonics per tip. A third tip, located between the other two, measures the ion saturation current directly. We compare the measured and calculated ion saturation currents for a variety of plasma conditions and demonstrate the validity of the technique and its use in reducing arcs.