Thermal conductivity vs depth profiling using the hot disk technique-Analysis of anisotropic, inhomogeneous structures.

A recently developed method for analyzing the thermal conductivity vs depth variation near a sample surface has been extended to include inhomogeneous samples with anisotropy. If not considered, the anisotropy ratio in the sample structure can distort the depth-position data of the original test method. The anisotropy ratio is introduced in the original computational scheme in order to improve the depth-position estimations for inhomogeneous structures with anisotropy. The proposed approach has been tested in experiments and shown to improve depth position mapping.