GaN Vertical Transistors with Staircase Channels for High-Voltage Applications.

In this study, we propose and simulate the design of a non-regrowth staircase channel GaN vertical trench transistor, demonstrating an exceptional threshold and breakdown characteristic for high power and high frequency applications. The unique staircase design provides a variable capacitance through the gate-dielectric-semiconductor interface, which results in a high breakdown voltage of 1.52 kV and maintains a channel on-resistance of 2.61 mΩ∙cm 2 . Because of the variable length and doping profile in the channel region, this model offers greater flexibility to meet a wide range of device application requirements.