Micro- and Nanostructure Analysis of Vapor-Phase-Grown AlN on Face-to-Face Annealed Sputtered AlN/Nanopatterned Sapphire Substrate Templates.
Yudai NakanishiYusuke HayashiTakeaki HamachiTetsuya ToheiYoshikata NakajimaShiyu XiaoKanako ShojikiHideto MiyakeAkira SakaiPublished in: Journal of electronic materials (2023)
The online version contains supplementary material available at 10.1007/s11664-023-10348-3.