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A Ceramic PZT-based PMUT Array for Endoscopic Photoacoustic Imaging.

Haoran WangZhenfang ChenHao YangHuabei JiangHuikai Xie
Published in: Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems (2020)
In this paper, we present the design, fabrication, and characterization of a compact 4 × 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4 μm-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8 × 1.6 mm2 with each pMUT element having a diameter of 210 μm. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array.
Keyphrases
  • high resolution
  • high throughput
  • fluorescence imaging
  • high density
  • mass spectrometry
  • magnetic resonance imaging
  • magnetic resonance
  • ultrasound guided
  • photodynamic therapy
  • diffusion weighted imaging
  • dual energy