Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics.

Jenna MultiaDmitry E Kravchenko Víctor Rubio-Giménez Anish Philip Rob Ameloot Maarit Karppinen

Published in: ACS applied nano materials (2023)

Atomic/molecular layer deposition (ALD/MLD) allows for the direct gas-phase synthesis of crystalline metal-organic framework (MOF) thin films. Here, we show for the first time using krypton and methanol physisorption measurements that ALD/MLD-fabricated copper 1,4-benzenedicarboxylate (Cu-BDC) ultrathin films possess accessible porosity matching that of the corresponding bulk MOF.

Keyphrases

metal organic framework
room temperature
carbon nanotubes