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Rapid Laser Manufacturing of Microfluidic Devices from Glass Substrates.

Krystian L WlodarczykRichard M CarterAmir JahanbakhshAmiel A LopesMark D MackenzieRobert R J MaierDuncan P HandM Mercedes Maroto-Valer
Published in: Micromachines (2018)
Conventional manufacturing of microfluidic devices from glass substrates is a complex, multi-step process that involves different fabrication techniques and tools. Hence, it is time-consuming and expensive, in particular for the prototyping of microfluidic devices in low quantities. This article describes a laser-based process that enables the rapid manufacturing of enclosed micro-structures by laser micromachining and microwelding of two 1.1-mm-thick borosilicate glass plates. The fabrication process was carried out only with a picosecond laser (Trumpf TruMicro 5×50) that was used for: (a) the generation of microfluidic patterns on glass, (b) the drilling of inlet/outlet ports into the material, and (c) the bonding of two glass plates together in order to enclose the laser-generated microstructures. Using this manufacturing approach, a fully-functional microfluidic device can be fabricated in less than two hours. Initial fluid flow experiments proved that the laser-generated microstructures are completely sealed; thus, they show a potential use in many industrial and scientific areas. This includes geological and petroleum engineering research, where such microfluidic devices can be used to investigate single-phase and multi-phase flow of various fluids (such as brine, oil, and CO₂) in porous media.
Keyphrases
  • circulating tumor cells
  • high throughput
  • single cell
  • high speed
  • label free
  • wastewater treatment
  • heavy metals
  • mass spectrometry
  • climate change
  • tissue engineering
  • human health
  • sensitive detection