Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II.
Wei-dong WangYong RuanZai-Fa ZhouMin LiuPublished in: Micromachines (2024)
Microelectromechanical system (MEMS) sensors are a miniaturized sensor technology that integrates sensors with microelectronic components using microelectromechanical system manufacturing technology [...].
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