Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li 3 PO 4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge.

Thin amorphous films of LiPON solid electrolyte were prepared by anodic evaporation of lithium orthophosphate Li 3 PO 4 in an arc discharge with a self-heating hollow cathode at a nitrogen pressure of 1 Pa. Distribution of the arc current between two electrodes having an anode potential provided independent control of the evaporation rate of Li 3 PO 4 and the density of nitrogen plasma. Stabilization of the evaporation rate was achieved using a crucible with multi-aperture cover having floating potential. The existence of a threshold value of discharge current (40 A) has been established, which, upon reaching ionic conductivity over 10 -8 S/cm, appears in the films. Probe diagnostics of discharge plasma were carried out. It has been shown that heating the films during deposition by plasma radiation to a temperature of 200 °C is not an impediment to achieving high ionic conductivity of the films. Dense uniform films of LiPON thickness 1 μm with ionic conductivity up to 1 × 10 -6 S/cm at a deposition rate of 4 nm/min are obtained.