Heterobimetallic Sodium Rare-Earth Complexes: "Third-Generation" MOCVD Precursors for the Deposition of NaREF4 (RE = Y, Gd) Films.
Sergio BattiatoPatrizia RossiPaola PaoliGraziella MalandrinoPublished in: Inorganic chemistry (2018)
We report the synthesis of novel heterobimetallic precursors of the formula [RE(hfa)4]-[Na·tetraglyme]+ [RE = Y, Gd; Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione; tetraglyme = 2,5,8,11,14-pentaoxapentadecane], which can be efficiently used as a single source for the metal-organic chemical vapor deposition of NaREF4 films.