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Durable and programmable ultrafast nanophotonic matrix of spectral pixels.

Tingbiao GuoZhi ZhangZijian LinJiahan TianYi JinJulian EvansYinghe XuSailing He
Published in: Nature nanotechnology (2024)
Locally addressable nanophotonic devices are essential for modern applications such as light detection, optical imaging, beam steering and displays. Despite recent advances, a versatile solution with a high-speed tuning rate, long-life durability and programmability across multiple pixels remains elusive. Here we introduce a programmable nanophotonic matrix consisting of vanadium dioxide (VO 2 ) cavities on pixelated microheaters that meets all these requirements. The indirect Joule heating of these VO 2 cavities can result in pronounced spectral modulation with colour changes and ensures exceptional endurance even after a million switching cycles. Precise control over the thermal dissipation power through a SiO 2 layer of an optimized thickness on Si facilitates an ultrafast modulation rate exceeding 70 kHz. We demonstrated a video-rate nanophotonic colour display by electrically addressing a matrix of 12 × 12 pixels. Furthermore, inspired by the unique pixel-level programmability with multiple intermediate states of the spectral pixels, a spatiotemporal modulation concept is introduced for spectrum detection.
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