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Evaluation of Zn: WO 3 Thin Films as a Sensing Layer for Detection of NH 3 Gas.

AnushaPriyanka KumariP PoorneshSaikat ChattopadhyayAshok RaoSuresh D Kulkarni
Published in: Micromachines (2023)
Pristine WO 3 and Zn-doped WO 3 were synthesized using the spray pyrolysis technique to detect ammonia gas. The prominent orientation of the crystallites along the (200) plane was evident from X-ray diffraction (XRD) studies. Scanning Electron Microscope (SEM) morphology indicated well-defined grains upon Zn doping with a smaller grain size of 62 nm for Zn-doped WO 3 (Zn: WO 3 ) film. The photoluminescence (PL) emission at different wavelengths was assigned to defects such as oxygen vacancies, interstitial oxygens, localized defects, etc. X-ray Photoelectron spectroscopy (XPS) studies confirmed the formation of oxygen vacancies in the deposited films. The ammonia (NH 3 ) sensing analysis of the deposited films was carried out at an optimum working temperature of 250 °C. The sensor performance of Zn: WO 3 was enhanced compared to pristine WO 3 at 1 ppm NH 3 concentration, elucidating the possibility of the films in sensing applications.
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