Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence.

John M GregoireDarren DaleAlexander KazimirovFrancis J DiSalvoR Bruce van Dover

Published in: Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society (2010)

We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate that both the composition reproducibility of the library deposition and the composition measurements have a precision of better than 1 atomic percent.

Keyphrases

high throughput
high resolution
single molecule
machine learning
deep learning
electronic health record
energy transfer
dual energy
electron microscopy
mass spectrometry