Electrostatically Controllable Channel Thickness and Tunable Low-Frequency Noise Characteristics of Double-Gated Multilayer MoS 2 Field-Effect Transistors with h-BN Dielectric.
Jimin ParkJunho NamJangyup SonWon Jun JungMin ParkDong Su LeeDae-Young JeonPublished in: ACS applied materials & interfaces (2022)
Two-dimensional transition-metal dichalcogenide (TMD) materials have attracted increasing attention in efforts to overcome fundamental issues faced by the complementary metal-oxide-semiconductor industry. Multilayer TMD materials such as MoS 2 can be used for high-performance transistor-based applications; the drive currents are high and the materials handle low-frequency (LF) noise well. We fabricated double-gated multilayer MoS 2 transistors using the h-BN dielectric for the top gate and silicon dioxide for the bottom gate. We systemically investigated the bottom gate voltage ( V b )-controlled electrical characteristics and the top/bottom interface-coupling effects. The effective thickness of the MoS 2 channel ( t MoS 2 _eff ) was well modulated by V b , and t MoS 2 _eff reduction by negative V b dramatically improved the I on / I off ratio. Numerical simulation and analytical modeling with a variation of the depletion depth under different bias conditions verified the experimental results. We were also the first to observe V b -tuned LF noise characteristics. Here, we discuss the V b -affected series resistance and carrier mobility in detail. Our findings greatly enhance the understanding of how double-gated multilayer MoS 2 transistors operate and will facilitate performance optimization in the real world.