Irreversible Bonding of Polydimethylsiloxane-Lithium Niobate using Oxygen Plasma Modification for Surface Acoustic Wave based Microfluidic Application: Theory and Experiment.

Acoustic microfluidic chips, fabricated by combining lithium niobate (LiNbO 3 ) with polydimethylsiloxane (PDMS), practically find applications in biomedicine. However, high-strength direct bonding of LiNbO 3 substrate with PDMS microchannel remains a challenge due to the large mismatching of thermal expansion coefficient at the interface and the lack of bonding theory. This paper elaborately reveals the bonding mechanisms of PDMS and LiNbO 3 , demonstrating an irreversible bonding method for PDMS-LiNbO 3 heterostructures using oxygen plasma modification. An in-situ monitoring strategy by using resonant devices is proposed for oxygen plasma, including quartz crystal microbalance (QCM) covered with PDMS and surface acoustic wave (SAW) fabricated by LiNbO 3 . When oxygen plasma exposure occurs, surfaces are cleaned, oxygen ions are implanted, and hydroxyl groups (-OH) are formed. Upon interfaces bonding, the interface will form niobium-oxygen-silicon covalent bonds to realize an irreversible connection. A champion bonding strength is obtained of 1.1 MPa, and the PDMS-LiNbO 3 acoustic microfluidic chip excels in leakage tests, withstanding pressures exceeding 60 psi, outperforming many previously reported devices. This work addresses the gap in PDMS-LiNbO 3 bonding theory and advances its practical application in the acoustic microfluidic field.