An optical trapping system for particle probes in plasma diagnostics.

We present one of the first experiments for optically trapping of single microparticles as probes for low temperature plasma diagnostics. Based on the dual laser beam, counter-propagating technique, SiO2 microparticles are optically trapped at very large distances in low-temperature, low-pressure rf plasma. External forces on the particle are measured by means of the displacement of the probe particle in the trap. Measurements can be performed during plasma operation as well as without plasma. The paper focuses on the optical setup and the verification of the system and its principle. Three examples for the particle behavior in the trapping system are presented: First, we measured the neutral gas damping as a verification of the technique. Second, an experiment without a plasma studies the changing particle charge by UV light radiation, and third, by moving the probe particle in the vertical direction into the sheath or into the plasma bulk, respectively, the acting forces on the probe particle are measured.