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A Li-Mn-O thin-film electrode probe has been developed via a facile synthesis process, which enables nanoscale electrochemical investigation of the solid-state electrolyte LiPON. Detailed information of ion transport can be obtained by the thin-film probe, rather than the macroscale electrochemical impedance analysis. It is clarified from the nanoscale analysis that the charge transfer resistance at the Li-Mn-O/LiPON interface dominates the localized impedance, while it can be significantly reduced rather than the electrolyte resistance by applying a DC bias.
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