Fiber-integrated Force Sensor using 3D Printed Spring-Composed Fabry-Perot Cavities with a High Precision Down to Tens of Piconewton.

Developing microscale sensors capable of force measurements down to the scale of piconewtons is of fundamental importance for a wide range of applications. To date, advanced instrumentations such as atomic force microscopes and other specifically developed micro/nano-electromechanical systems face challenges such as high cost, complex detection systems and poor electromagnetic compatibility. Here, we present the unprecedented design and 3D printing of general fiber-integrated force sensors using spring-composed Fabry-Perot cavities. We calibrate these microscale devices employing varied-diameter μ m-scale silica particles as standard weights. The force sensitivity and resolution reach values of (0.436 ± 0.007) nm/nN and (40.0 ± 0.7) pN, respectively, which are the best resolutions among all fiber-based nanomechanical probes so far. We also measured the non-linear airflow force distributions produced from a nozzle with an orifice of 2 μ m which matches well with the full-sized simulations. With further customization of their geometries and materials, we anticipate the easy-to-use force probe can well extend to many other applications such as air/fluidic turbulences sensing, micro-manipulations, and biological sensing. This article is protected by copyright. All rights reserved.