Fabrication of Quasi-Sinusoidal Surface Relief Optical Transmission Gratings in Pyrex and IOG Glasses by Implantation with Oxygen and Nitrogen Ion Microbeams of the 5-6 MeV Energy Range.

A method for the fabrication of high diffraction efficiency optical transmission gratings with quasi-sinusoidal profile in glasses by microbeams of medium-mass ions of 5-6 MeV energy was devised and demonstrated. Gratings with a 30 μm grating constant have been manufactured and characterized by interference microscopy and microprofilometry. The obtained surface profiles of the gratings were found to be quasi-sinusoidal with up to 265 nm amplitude. Measured highest first-order diffraction efficiencies were around 26% in both Pyrex and IOG glasses. Such gratings could serve as coupling elements in integrated optics and photonic integrated circuits.