Correction: Integrated silicon photonic MEMS.

Niels Quack Alain Yuji Takabayashi Hamed Sattari Pierre Edinger Gaehun Jo Simon J Bleiker Carlos Errando-Herranz Kristinn B Gylfason Frank Niklaus Umar Khan Peter Verheyen Arun Kumar MallikJun Su LeeMoises JezziniIman ZandPadraic MorrisseyCleitus Antony Peter O'Brien Wim Bogaerts

Published in: Microsystems & nanoengineering (2024)

[This corrects the article DOI: 10.1038/s41378-023-00498-z.].

Keyphrases

high speed