Correction: Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process.

Yingying LiElliott WorseySimon J BleikerPierre EdingerMukesh Kumar KulsreshathQi TangAlain Yuji TakabayashiNiels QuackPeter VerheyenWim BogaertsKristinn B GylfasonDinesh PamunuwaFrank Niklaus

Published in: Nanoscale (2023)

Correction for 'Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process' by Yingying Li et al. , Nanoscale , 2023, https://doi.org/10.1039/d3nr03429a.

Keyphrases

mass spectrometry
high resolution
solid state