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Temperature-Driven α-β Phase Transformation and Enhanced Electronic Property of 2H α-In 2 Se 3 .

Fengjiao LyuXuan LiJiamin TianZhiwei LiBo LiuQing Chen
Published in: ACS applied materials & interfaces (2022)
In recent years, thin layered indium selenide (In 2 Se 3 ) has attracted rapidly increasing attention due to its fascinating properties and promising applications. Here, we report the temperature-driven α-β phase transformation and the enhanced electronic property of 2H α -In 2 Se 3 . We find that 2H α-In 2 Se 3 transforms to β-In 2 Se 3 when it is heated to a high temperature, and the transformation temperature increases from 550 to 650 K with the thickness decreasing from 67 to 17 nm. Additionally, annealing the sample below the phase transformation temperature can effectively improve the electronic property of a 2H α-In 2 Se 3 field-effect transistor, including increasing the on-state current, decreasing the off-state current, and improving the subthreshold swing. After annealing, not only the contact resistance decreases significantly but also the mobility at 300 K increases more than 2 times to 45.83 cm 2 V -1 s -1 , which is the highest among the reported values. Our results provide an effective method to improve the electrical property and the stability of the In 2 Se 3 nanodevices.
Keyphrases
  • high temperature
  • gold nanoparticles
  • reduced graphene oxide