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Commensurability-Driven Orientation Control during Block Copolymer Directed Self-Assembly.

Hyun Su YunHyung Wan DoKarl K BerggrenCaroline A RossHong Kyoon Choi
Published in: ACS applied materials & interfaces (2020)
In this study, the orientation of block copolymer (BCP) patterns in topographical templates is controlled using a simple template design rule. The orientation of the pattern is selected by using a template with one commensurate dimension and one incommensurate dimension. An array of binary states of a BCP pattern can be programmed into a desired layout by tuning of the template wall thickness.
Keyphrases
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