Simultaneous observation of multiple interferograms with Mach-Zehnder type electron interferometer on a 1.2-MV field-emission transmission electron microscope.

We developed a Mach-Zehnder type electron interferometer (MZ-EI) that enables simultaneous observation of interferograms created at multiple output locations on a 1.2-MV field-emission transmission electron microscope. This MZ-EI is composed of two single-crystal thin films, a lens located between the single-crystal thin films, and imaging lenses. By comparing interferograms created by electron waves travelling through different beam paths, we found that the relative phase difference was caused by phase modulation passing through the single crystals and by aberrations and defocus values of the lenses. We also confirmed that the relative phase difference can be controlled using the tilted illumination method.