Electron diffraction and imaging for atom probe tomography.

Previous work has shown that pre- and post-experiment quantification of atom probe tomography (APT) specimen geometry using electron microscopy can constrain otherwise unknown parameters, leading to an improvement in data fidelity. To that end, an electron microscopy and diffraction system has been developed for in situ compatibility with modern APT hardware. The system is capable of secondary and backscattered scanning electron imaging, bright field and dark field scanning transmission electron imaging, and scanning transmission electron diffraction. Additionally, the system is also capable of in situ dynamic electron diffraction experiments using laser pulsed heating of the APT specimen.