Study on Static Characteristics of Aerostatic Bearing Based on Porous SiC Ceramic Membranes.

The porous aerostatic bearing is a new supporting structure that is widely used in precision and ultraprecision engineering and the aerospace and other fields. The aerostatic bearing has a good bearing capacity and static stiffness. In this work, the numerical and experimental research on the static characteristics of an aerostatic bearing based on a porous SiC ceramic membrane is presented. The porous ceramic membrane prepared by reactive sintering, with a porosity of 25.8% and a pore size of 20.55 μm, was used as the restrictor to fabricate the aerostatic bearing. It was found that the ceramics have good permeability, and the permeability coefficient reached 2.78 × 10 -13 m 2 using permeability-test experiments. The effects of the gas-supply pressure and permeability coefficient on the static characteristics of the aerostatic bearing based on porous ceramics were analyzed using Fluent simulation calculation. When the gas-supply pressure was 0.5 MPa and the gas-film thickness was 6 μm, the static stiffness of the aerostatic bearing reached a maximum of 20.9 N/μm, while the bearing capacity was 632.5 N. The numerical results of the static characteristics of the aerostatic bearing are highly consistent with the experimental results, which verifies the accuracy of the Fluent simulation, and provides convenience for studying the static characteristics of aerostatic bearings.