Solubility Change Behavior of Fluoroalkyl Ether-Tagged Dendritic Hexaphenol under Extreme UV Exposure.
Hyun-Taek OhGayoung KimSeok-Heon JungYejin KuJin-Kyun LeeKanghyun KimByeong-Gyu ParkSangsul LeeChawon KohTsunehiro NishiHyun-Woo KimPublished in: ACS omega (2024)
This study focuses on the discovery of a single-component molecular resist for extreme ultraviolet (EUV) lithography by employing the ionizing radiation-induced decomposition of carbon-fluorine chemical bonds. The target material, DHP-L6 , was synthesized by bonding perfluoroalkyl ether moieties to amorphous dendritic hexaphenol (DHP) with a high glass transition temperature. Upon exposure to EUV and electron beam irradiation, DHP-L6 films exhibited a decreasing solubility in fluorous developer media, resulting in negative-tone images. The underlying chemical mechanisms were elucidated by Fourier transform-infrared spectroscopy (FT-IR), X-ray photoelectron spectroscopy, and nanoindentation experiments. These analyses highlighted the possible electron-induced decomposition of C-F bonds in DHP-L6 , leading to molecular network formation via recombination of the resulting C-centered radicals. Subsequent high-resolution lithographic patterning under EUV irradiation showed that DHP-L6 could create stencil patterns with a line width of 26 nm at an exposure dose of 110 mJ cm -2 . These results confirm that single-component small molecular compounds with fluoroalkyl moieties can be employed as patterning materials under ionizing radiation. Nonetheless, additional research is required to reduce the relatively high exposure energy for high-resolution patterning and to enhance the line-edge roughness of the produced stencil.
Keyphrases
- high resolution
- high glucose
- single molecule
- diabetic rats
- small molecule
- mass spectrometry
- climate change
- room temperature
- electron microscopy
- high speed
- high throughput
- photodynamic therapy
- ionic liquid
- tandem mass spectrometry
- magnetic resonance imaging
- magnetic resonance
- computed tomography
- radiation therapy
- radiation induced
- solid state
- dual energy
- dna repair
- endothelial cells
- aqueous solution
- transition metal