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Editorial for the Special Issue on Optical MEMS.

HuiKai XieFrederic Zamkotsian
Published in: Micromachines (2019)
Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale [...].
Keyphrases
  • high speed
  • high resolution