Novel Volatile Heteroleptic Barium Complexes Using Tetradentate Ligand and β-Diketonato Ligand.

Novel barium heteroleptic complexes were synthesized through the substitution of the bis(trimethylsilyl)amide of Ba(btsa) 2 ·2DME with aminoalkoxide and β-diketonate ligands. Compounds [Ba(ddemap)(tmhd)] 2 ( 1 ) and [Ba(ddemmp)(tmhd)] 2 ( 2 ) were obtained and analyzed through Fourier transform infrared spectroscopy, nuclear magnetic resonance, thermogravimetric analysis, and elemental analysis (ddemapH = 1-(dimethylamino)-5-((2-(dimethylamino)ethyl) (methyl)amino)pentan-3-ol and ddemmpH = 1-(dimethylamino)-5-((2-(dimethylamino)ethyl) (methyl)amino)-3-methylpentan-3-ol). In single-crystal X-ray crystallography, complex 1 exhibited a dimeric structure with μ 2 -O bonds of the ddemap ligand. All complexes exhibited high volatility and could be sublimed under reduced pressure (0.5 Torr) at 160 °C, indicating that these complexes are promising candidates as atomic layer deposition or chemical vapor deposition precursors for the growth of barium-containing thin films.