High-performance RRAM using two-dimensional electron gas (2DEG) electrode and Its switching mechanism analysis.

In this study, a two-dimensional electron gas (2DEG), which is a conductive layer formed at the interface of Al2O3 and TiO2, was used as an electrode for resistive random access memory (RRAM) and implemented in a cell size down to 30 nm. For an RRAM device comprising W/2DEG/TiO2/W, we confirmed that the dominant switching mechanism changed from interfacial to filamentary as the cell size decreased from 500 nm to 30 nm. Through analyses of changes in forming characteristics and conduction mechanisms in the low resistive state depending on the cell size, it was identified that the 2DEG acted as an oxygen-scavenging layer of TiO2 during the resistive switching process. By comparing the switching characteristics of RRAM devices with 2DEG and without 2DEG for a 30-nm cell size, we confirmed that a high-performance 2DEG RRAM was realized, with highly uniform I-V characteristics, a low operating voltage (~1 V), and a high on/off ratio (>102). Finally, the applicability of the proposed device to a crossbar array was validated by evaluating 1S1R operation with an NbO2-based selector. Considering the improved switching uniformity, the 2DEG RRAM shows promise for high-density memory applications.&#xD.