Analysis of the Response Characteristics of Toluene Gas Sensors with a ZnO Nanorod Structure by a Heat Treatment Process.

The sensing characteristics of toluene gas are monitored by fabricating ZnO nanorod structures. ZnO nanostructured sensor materials are produced on a Zn film via an ultrasonic process in a 0.01 M aqueous solution of C 6 H 12 N 4 and Zn(NO 3 ) 2 ∙6H 2 O. The response of the sensors subjected to heat treatment in oxygen and nitrogen atmospheres is improved by 20% and 10%, respectively. The improvement is considered to be correlated with the increase in grain size. The relationship between the heat treatment and sensing characteristics is evaluated.