Continuous-wave laser annealing of metallic layers for CuInSe 2 solar cell applications: effect of preheating treatment on grain growth.

Ultra-fast thermal annealing of semiconductor materials using a laser can be revolutionary for short processing times and low manufacturing costs. Here we investigate Cu-In-Se thin films as precursors for CuInSe 2 semiconductor absorber layers via laser annealing. The reaction mechanism of laser annealed metal stacks is revealed by measuring ex situ X-ray diffractograms, Raman spectra and composition. It is shown that the formation of CuInSe 2 occurs via the formation of Cu x Se/In x Se y binary phases as in conventional annealing routes, despite the entirely different annealing time scale. Pre-alloying the Cu and In metals prior to laser annealing significantly enhances the selenisation reaction rate. Laser annealing for six seconds approaches a near phase-pure material, which exhibits similar crystalline quality to the reference material annealed for ninety minutes in a tube furnace. The estimated quasi Fermi level splitting deficit for the laser annealed material is only 60 meV lower than the reference sample, which implies a high optoelectronic quality.