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Thin-Film Microtensile-Test Structures for High-Throughput Characterization of Mechanical Properties.

T OellersV G ArigelaC KirchlechnerG DehmAlfred Ludwig
Published in: ACS combinatorial science (2020)
A photolithographic process for the rapid fabrication of thin-film tensile-test structures is presented. The process is applicable to various physical vapor deposition techniques and can be used for the combinatorial fabrication of thin-film tensile-test structure materials libraries for the high-throughput characterization of mechanical properties. The functionality of the fabrication process and the feasibility of performing high-quality measurements with these structures are demonstrated with Cu tensile-test structures. In addition, the scalability from unary structures to libraries with compositional variations is demonstrated.
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