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Solution-processed ultra-low-k thin films comprising single-walled aluminosilicate nanotubes.

An-Chih YangYun-Shiuan LiChon Hei LamHeng-Yu ChiI-Chun ChengDun-Yen Kang
Published in: Nanoscale (2018)
Nanotube-based ultra-low-k thin films with high Young's modulus composed of single-walled aluminosilicate nanotubes (AlSiNTs) and a trace amount of poly(vinyl alcohol) (PVA) have been developed. The dehydrated AlSiNT film possesses a relative permittivity of 1.05, and a Young's modulus of 25 GPa, which exceed those of most existing ultra-low-k materials.
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