Bearingless Inertial Rotational Stage for Atomic Force Microscopy.
Eva OsunaAitor ZambudioPablo AresCristina Gómez-NavarroJulio Gómez-HerreroPublished in: Micromachines (2024)
We introduce a novel rotational stage based on inertial motion, designed to be lightweight, compact, and fully compatible with atomic force microscopy (AFM) systems. Our characterization of this stage demonstrates high angular precision, achieving a maximum rotational speed of 0.083 rad/s and a minimum angular step of 11.8 μrad. The stage exhibits reliable performance, maintaining continuous operation for extended periods. When tested within an AFM setup, the stage deliveres excellent results, confirming its efficacy for scanning probe microscopy studies.