High Volatile Antimony(III) Precursors for Metal Oxide Thin Film Deposition.

We report the synthesis and characterization of novel antimony(III) complexes: Sb(mpa) 3 ( 1 ), Sb(mmpa) 3 ( 2 ), Sb(mdpa) 3 ( 3 ), Sb(epa) 3 ( 4 ), Sb(empa) 3 ( 5 ), and Sb(edpa) 3 ( 6 ) (mpa = N -methoxypropanamide, mmpa = N -methoxy-2-methyl-propanamide, mdpa = N -methoxy-2,2-dimethylpropanamide, epa = N -ethoxypropanamide, empa = N -ethoxy-2-methylpropanamide, and edpa = N -ethoxy-2,2-dimethylpropanamide, via a salt-elimination reaction with SbCl 3 and sodium-substituted carboxamide. The molecular structure of 6 revealed the formation of a homoleptic conformer with a highly distorted pentagonal bipyramidal geometry, as determined by X-ray crystallography. Thermogravimetric analysis showed excellent volatility at elevated temperatures, with complex 4 displaying the lowest residual mass of 0.16% at 500 °C. For complexes 4 , 5 , and 6 , the temperature at a vapor pressure of 1 Torr and the enthalpy of vaporization were estimated to be 58, 64, and 45 °C and 83.31, 103.58, and 99.93 kJ/mol, respectively.