Zero-Bias Power-Detector Circuits based on MoS 2 Field-Effect Transistors on Wafer-Scale Flexible Substrates.
Eros ReatoPaula PalaciosBurkay UzluMohamed SaeedAnnika GrundmannZhenyu WangDaniel S SchneiderZhenxing WangMichael HeukenHolger KalischAndrei VescanAleksandra RadenovićAlberto CiarrocchiDaniel NeumaierRenato NegraMax C LemmePublished in: Advanced materials (Deerfield Beach, Fla.) (2022)
The design, fabrication, and characterization of wafer-scale, zero-bias power detectors based on 2D MoS 2 field-effect transistors (FETs) are demonstrated. The MoS 2 FETs are fabricated using a wafer-scale process on 8 μm-thick polyimide film, which, in principle, serves as a flexible substrate. The performances of two chemical vapor deposition MoS 2 sheets, grown with different processes and showing different thicknesses, are analyzed and compared from the single device fabrication and characterization steps to the circuit level. The power-detector prototypes exploit the nonlinearity of the transistors above the cut-off frequency of the devices. The proposed detectors are designed employing a transistor model based on measurement results. The fabricated circuits operate in the Ku-band between 12 and 18 GHz, with a demonstrated voltage responsivity of 45 V W -1 at 18 GHz in the case of monolayer MoS 2 and 104 V W -1 at 16 GHz in the case of multilayer MoS 2 , both achieved without applied DC bias. They are the best-performing power detectors fabricated on flexible substrate reported to date. The measured dynamic range exceeds 30 dB, outperforming other semiconductor technologies like silicon complementary metal-oxide-semiconductor circuits and GaAs Schottky diodes.