An investigation of the beam damage effect on in situ liquid secondary ion mass spectrometry analysis.
Xiaofei YuJiachao YuYufan ZhouYanyan ZhangJungang WangJames E EvansXiao-Ying YuXue-Lin WangZihua ZhuPublished in: Rapid communications in mass spectrometry : RCM (2018)
Therefore, beam damage may not be a concern in in situ liquid SIMS analysis if proper experimental conditions are used.